US Patent 9065358 MEMS structure and method of forming same
Is a
Date Filed
August 29, 2011
0
Date of Patent
June 23, 2015
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Patent Application Number
13219927
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Patent Inventor Names
Chia-Hua Chu
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Kuei-Sung Chang
0
Yi Heng Tsai
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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