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US Patent 9081193 Interferometric systems and methods

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
June 21, 2013
Date of Patent
July 14, 2015
Patent Application Number
13924065
Patent Citations Received
‌
US Patent 11906753 Optical system in particular for microlithography
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9081193
Patent Primary Examiner
‌
Thomas K Pham

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