US Patent 9117855 Polarity control for remote plasma
Patent 9117855 was granted and assigned to Applied Materials on August, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 31, 2014
Date of Patent
August 25, 2015
Patent Applicant
Patent Application Number
14230237
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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