US Patent 9122154 Radiation-sensitive resin composition, and radiation-sensitive acid generating agent
Patent 9122154 was granted and assigned to JSR Corporation on September, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 8, 2013
Date of Patent
September 1, 2015
Patent Applicant
Patent Application Number
13937048
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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