Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 1, 2015
Patent Application Number
14312490
Date Filed
June 23, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
A system and method for modeling microelectromechanical devices is disclosed. An embodiment includes separating the microelectromechanical design into separate regions and modeling the separate regions separately. Parametric parameters or parametric equations may be utilized in the separate models. The separate models may be integrated into a MEMS device model. The MEMS device model may be tested and calibrated, and then may be used to model new designs for microelectromechanical devices.
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