Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 15, 2015
Patent Application Number
14296729
Date Filed
June 5, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
A MEMS structure incorporating multiple joined substrates and a method for forming the MEMS structure are disclosed. An exemplary MEMS structure includes a first substrate having a bottom surface and a second substrate having a top surface substantially parallel to the bottom surface of the first substrate. The bottom surface of the first substrate is connected to the top surface of the second substrate by an anchor, such that the anchor does not extend through either the bottom surface of the first substrate or the top surface of the second substrate. The MEMS structure may include a bonding layer in contact with the bottom surface of the first substrate, and shaped to at least partially envelop the anchor.
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