Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 6, 2015
Patent Application Number
13361724
Date Filed
January 30, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.
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