US Patent 9154103 Temperature controlled acoustic resonator
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Patent abstract
An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.
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US Patent 09154103 Temperature controlled acoustic resonator US Patent 9154103 Temperature controlled acoustic resonator
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Patent Number
0915410300
Patent Number
915410300
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Patent Jurisdiction
Patent Number
091541030
Date of Patent
October 6, 2015
0Patent Application Number
133617240
Date Filed
January 30, 2012
0Official Website
Patent Primary Examiner
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Infobox
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Patent Jurisdiction
Patent Number
091541030
Date of Patent
October 6, 2015
0Patent Application Number
133617240
Date Filed
January 30, 2012
0Official Website
Patent Primary Examiner
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US Patent 09154103 Temperature controlled acoustic resonator
Infobox
Is a
Patent jurisdiction
Patent number
09154103
Date of patent
October 6, 2015
Patent application number
13361724
Date Filed
January 30, 2012
Patent primary examiner
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