US Patent 9159595 Thin wafer carrier
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Patent abstract
An improved wafer carrier device for carrying and holding semiconductor wafers that have a thickness of below 100 micrometers includes a transportable wafer chuck having an enclosed vacuum reservoir and a top surface configured to support a wafer. The top surface has one or more through-openings extending from the top surface to the vacuum reservoir and the wafer is held onto the top surface via vacuum from the vacuum reservoir drawn through the through-openings.
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US Patent 09159595 Thin wafer carrier US Patent 9159595 Thin wafer carrier
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Patent Number
091595950
Patent Number
91595950
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Official Website
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Patent Jurisdiction
Patent Number
091595950
Date of Patent
October 13, 2015
0Patent Application Number
130222150
Date Filed
February 7, 2011
0Official Website
Patent Primary Examiner
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US Patent 09159595 Thin wafer carrier
Infobox
Is a
Patent jurisdiction
Patent number
09159595
Date of patent
October 13, 2015
Patent application number
13022215
Date Filed
February 7, 2011
Patent primary examiner
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