US Patent 9170211 Design-based inspection using repeating structures

Patent 9170211 was granted and assigned to KLA-Tencor on October, 2015 by the United States Patent and Trademark Office.

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Date of Patent

October 27, 2015

Patent Application Number

134202240

Date Filed

March 14, 2012

Patent Citations Received

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Patent abstract

Systems and methods for design-based inspection using repeating structures are provided.

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