US Patent 9170211 Design-based inspection using repeating structures
Patent 9170211 was granted and assigned to KLA-Tencor on October, 2015 by the United States Patent and Trademark Office.
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Patent abstract
Systems and methods for design-based inspection using repeating structures are provided.
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Patent Citations Received
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US Patent 09170211 Design-based inspection using repeating structures US Patent 9170211 Design-based inspection using repeating structures
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Patent Number
091702110
Patent Number
91702110
Edits on 28 Sep, 2022
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
091702110
Date of Patent
October 27, 2015
0Patent Application Number
134202240
Date Filed
March 14, 2012
0Official Website
Patent Primary Examiner
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US Patent 09170211 Design-based inspection using repeating structures
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
09170211
Date of patent
October 27, 2015
Patent application number
13420224
Date Filed
March 14, 2012
Patent primary examiner
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