US Patent 9236877 Micro-electro-mechanical systems (MEMS), systems, and operating methods thereof

A micro-electro-mechanical system (MEMS) includes a micro-mechanical structure that generates a first electrical signal. An analog-to-digital converter (ADC) is coupled with the micro-mechanical structure. The first electrical signal is converted to a second electrical signal using a converter coupled between the micro-mechanical structure and the ADC. The first electrical signal is free from being amplified.