US Patent 9255327 Thermally stable volatile precursors
Patent 9255327 was granted and assigned to Wayne State University on February, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 23, 2011
Date of Patent
February 9, 2016
Patent Application Number
13818154
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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