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US Patent 9256119 Phase-shift blankmask and method for fabricating the same

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Patent abstract

Provided is a phase-shift blankmask in which a phase-shift layer is formed in at least two continuous layers or a multi-layer film and an uppermost phase-shift layer included in the phase-shift layer is thinly formed to contain a small amount of oxygen (O) so as to enhance chemical resistance and durability thereof.

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Patent Citations Received
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US Patent 11774303 Accelerator, steering wheel, six-axis sensor, engine, bumper and the like
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Patent Citations Received
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US Patent 11747225 Strain gauge with improved stability and stress reduction
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US Patent 09256119 Phase-shift blankmask and method for fabricating the same US Patent 9256119 Phase-shift blankmask and method for fabricating the same

Infobox
Patent Number
0925611900
Patent Number
925611900
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0925611900
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edited on 27 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
092561190
Date of Patent
February 9, 2016
0
Patent Application Number
138646240
Date Filed
April 17, 2013
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=092561190
Patent Primary Examiner
‌
Stephen Rosasco
0
Edits on 28 Sep, 2022
"Entity importer update"
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edited on 28 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
092561190
Date of Patent
February 9, 2016
0
Patent Application Number
138646240
Date Filed
April 17, 2013
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=092561190
Patent Primary Examiner
‌
Stephen Rosasco
0
Edits on 17 Jun, 2022
"Entity importer update"
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09256119
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 US Patent 09256119 Phase-shift blankmask and method for fabricating the same

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09256119
Date of patent
February 9, 2016
Patent application number
13864624
Date Filed
April 17, 2013
Patent primary examiner
‌
Stephen Rosasco

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