US Patent 9266267 Method of manufacturing a sensor
Is a
Date Filed
February 28, 2013
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Date of Patent
February 23, 2016
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Patent Application Number
13780731
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Patent Inventor Names
Lothar Biebricher
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Martin Watzlawik
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Andreas Doering
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Dietmar Huber
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Edmond De Volder
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Jakob Schillinger
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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