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US Patent 9306533 RF impedance matching network

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
June 9, 2015
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Date of Patent
April 5, 2016
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Patent Application Number
14734053
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Patent Citations Received
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
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US Patent 12111341 In-situ electric field detection method and apparatus
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US Patent 12125673 Pulsed voltage source for plasma processing applications
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US Patent 11657980 Dielectric fluid variable capacitor
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US Patent 11670484 Variable output impedance RF generator
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US Patent 11670488 Fast arc detecting match network
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US Patent 11689107 Nanosecond pulser bias compensation
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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform
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US Patent 11749502 System and method for pulse modulation of radio frequency power supply and reaction chamber thereof
•••
Patent Inventor Names
Anton Mavretic
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9306533
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Patent Primary Examiner
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Stephen E. Jones
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