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US Patent 9306533 RF impedance matching network

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Edits on 30 Oct, 2024
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US Patent 12132435 Method for repeatable stepper motor homing
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edited on 23 Oct, 2024
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US Patent 12125673 Pulsed voltage source for plasma processing applications
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US Patent 12111341 In-situ electric field detection method and apparatus
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edited on 3 Oct, 2024
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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
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Edits on 7 Aug, 2024
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Edits on 31 Jul, 2024
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US Patent 12027351 Plasma non-uniformity detection
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Edits on 5 Jun, 2024
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edited on 5 Jun, 2024
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US Patent 12002611 High power low frequency coils
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Edits on 15 May, 2024
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edited on 15 May, 2024
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US Patent 11984306 Plasma chamber and chamber component cleaning methods
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Edits on 1 May, 2024
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edited on 1 May, 2024
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US Patent 11972924 Pulsed voltage source for plasma processing applications
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edited on 1 May, 2024
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US Patent 11972928 Method and system for plasma processing arc suppression
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Edits on 24 Apr, 2024
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edited on 24 Apr, 2024
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US Patent 11967483 Plasma excitation with ion energy control
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Edits on 17 Apr, 2024
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edited on 17 Apr, 2024
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US Patent 11961711 Radio frequency match network and generator
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Edits on 4 Apr, 2024
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edited on 4 Apr, 2024
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US Patent 11948780 Automatic electrostatic chuck bias compensation during plasma processing
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edited on 4 Apr, 2024
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US Patent 11948775 Combined RF generator and RF solid-state matching network
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Edits on 12 Mar, 2024
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edited on 12 Mar, 2024
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US Patent 11923175 Systems and methods for variable gain tuning of matching networks
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Edits on 1 Feb, 2024
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edited on 1 Feb, 2024
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US Patent 11887813 Pulsed voltage source for plasma processing
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Golden AI
edited on 1 Feb, 2024
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US Patent 11887820 Sector shunts for plasma-based wafer processing systems
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Edits on 19 Jan, 2024
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edited on 19 Jan, 2024
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US Patent 11875971 Efficient energy recovery in a nanosecond pulser circuit
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