Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 12, 2016
Patent Application Number
13994183
Date Filed
December 20, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
A receiving means for receiving and mounting of wafers. The receiving means includes a mounting surface. A mounting means is provided for mounting a wafer on the mounting surface. A compensation means is provided for active, especially locally controllable, at least partial compensation of local and/or global distortions of the wafer.
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