Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexander Filbert
Thomas Wagenleitner
Markus Wimplinger
Date of Patent
September 12, 2023
Patent Application Number
17735239
Date Filed
May 3, 2022
Patent Citations
...
Patent Primary Examiner
A receiving means for receiving and mounting of wafers, comprised of a mounting surface, mounting means for mounting a wafer onto the mounting surface and compensation means for active, locally controllable, compensation of local and/or global distortions of the wafer.
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