Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Markus Wimplinger0
Alexander Filbert0
Thomas Wagenleitner0
Date of Patent
January 5, 2021
0Patent Application Number
162838890
Date Filed
February 25, 2019
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A receiving means for receiving and mounting of wafers, comprised of a mounting surface, mounting means for mounting a wafer onto the mounting surface and compensation means for active, locally controllable, compensation of local and/or global distortions of the wafer.
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