US Patent 9358658 Polishing system with front side pressure control
Patent 9358658 was granted and assigned to Applied Materials on June, 2016 by the United States Patent and Trademark Office.
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Patent abstract
A polishing apparatus includes a platen having a first surface to support a polishing pad and a second surface, a carrier head to hold a substrate against the polishing pad, a plurality of through-holes defined in the platen, and a pad pressure control assembly adjacent on a side of the platen opposite the carrier head.
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Patent Inventor Names
Hung Chih Chen0
Paul D. Butterfield0
Shou-Sung Chang0
Takashi Fujikawa0
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Official Website
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Patent Citations Received
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US Patent 09358658 Polishing system with front side pressure control US Patent 9358658 Polishing system with front side pressure control
Infobox
Patent Number
093586580
Patent Number
93586580
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
093586580
Date of Patent
June 7, 2016
0Patent Application Number
142138420
Date Filed
March 14, 2014
0Official Website
Patent Primary Examiner
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US Patent 09358658 Polishing system with front side pressure control
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
09358658
Date of patent
June 7, 2016
Patent application number
14213842
Date Filed
March 14, 2014
Patent primary examiner
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