US Patent 9368572 Vertical transistor with air-gap spacer

Patent

US Patent 12125897 Air spacers in transistors and methods forming same

US Patent 11908911 Thin film transistors with raised source and drain contacts and process for forming such

US Patent 12002708 Method for forming intermetallic air gap

US Patent 11694932 Array of vertical transistors, an array of memory cells comprising an array of vertical transistors, and a method used in forming an array of vertical transistors

US Patent 11855178 Semiconductor devices having air-gap

US Patent 11876114 Airgap gate spacer

US Patent 11894262 Back side processing of integrated circuit structures to form insulation structure between adjacent transistor structures

United States Patent and Trademark Office

Mark Tornow