US Patent 9372406 Film portion at wafer edge
Patent 9372406 was granted and assigned to Taiwan Semiconductor Manufacturing Company on June, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 11, 2013
0
Date of Patent
June 21, 2016
0
Patent Applicant
Patent Application Number
13764155
0
Patent Citations Received
Patent Inventor Names
Chun-Wei Chang
0
Hung-Chang Hsieh
0
Wang-Pen Mo
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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