Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 12, 2016
Patent Application Number
13337604
Date Filed
December 27, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
A device for performing ALD includes a housing having a vacuum chamber that surrounds a horizontal flow reactor. The device further includes a gas distribution system for delivering gases to the reactor. The gas distribution system includes at least one of a high temperature valve and a high temperature filter disposed inside the vacuum chamber. The high temperature valve (and/or filter) controls (and/or filters) a supply of a precursor/reactant gas, inert gas, or precursor/reactant and inert gas mixture before it enters the horizontal flow reactor.
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