Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dennis P. Rodier0
Neil J. Bassom0
Benjamin Colombeau0
Costel Biloiu0
Craig R. Chaney0
Date of Patent
July 19, 2016
0Patent Application Number
134772530
Date Filed
May 22, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, a method for generating an ion beam having gallium ions includes providing at least a portion of a gallium compound target in a plasma chamber, the gallium compound target comprising gallium and at least one additional element. The method also includes initiating a plasma in the plasma chamber using at least one gaseous species and providing a source of gaseous etchant species to react with the gallium compound target to form a volatile gallium species.
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