US Patent 9396902 Gallium ION source and materials therefore
Patent 9396902 was granted and assigned to Varian Semiconductor Equipment Associates on July, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 22, 2012
0
Date of Patent
July 19, 2016
0
Patent Application Number
13477253
0
Patent Inventor Names
Dennis P. Rodier
0
Neil J. Bassom
0
Benjamin Colombeau
0
Costel Biloiu
0
Craig R. Chaney
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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