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US Patent 9444428 Film bulk acoustic resonators comprising backside vias

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US Patent 11981559 Enclosed cavity structures
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US Patent 11884537 Enclosed cavity structures
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US Patent 11834330 Enclosed cavity structures
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Patent abstract

An film bulk acoustic wave resonator (FBAR) structure has an FBAR and a via disposed substantially directly beneath the FBAR. The via is in thermal contact with the FBAR. A plurality of vias may be included. The via(s) serve to dissipate heat generated by the FBAR structure during operation.

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US Patent 09444428 Film bulk acoustic resonators comprising backside vias US Patent 9444428 Film bulk acoustic resonators comprising backside vias

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Patent Number
0944442800
Patent Number
944442800
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0944442800
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
094444280
Date of Patent
September 13, 2016
0
Patent Application Number
144712100
Date Filed
August 28, 2014
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=094444280
Patent Primary Examiner
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Benny Lee
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edited on 24 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
094444280
Date of Patent
September 13, 2016
0
Patent Application Number
144712100
Date Filed
August 28, 2014
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=094444280
Patent Primary Examiner
‌
Benny Lee
0
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https://pdfpiw.uspto.gov/.piw?Docid=09444428
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 US Patent 09444428 Film bulk acoustic resonators comprising backside vias

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09444428
Date of patent
September 13, 2016
Patent application number
14471210
Date Filed
August 28, 2014
Patent primary examiner
‌
Benny Lee

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