Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 20, 2016
Patent Application Number
13888921
Date Filed
May 7, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method includes performing a plasma activation on a surface of a first package component, removing oxide regions from surfaces of metal pads of the first package component, and performing a pre-bonding to bond the first package component to a second package component.
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