Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 18, 2016
Patent Application Number
13853437
Date Filed
March 29, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.