US Patent 9470711 Physical quantity sensor and electronic apparatus
Patent 9470711 was granted and assigned to Seiko Epson on October, 2016 by the United States Patent and Trademark Office.
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Patent abstract
A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.
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US Patent 09470711 Physical quantity sensor and electronic apparatus US Patent 9470711 Physical quantity sensor and electronic apparatus
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Patent Number
0947071100
Patent Number
947071100
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Current Assignee
Patent Jurisdiction
Patent Number
094707110
Date of Patent
October 18, 2016
0Patent Application Number
138534370
Date Filed
March 29, 2013
0Official Website
Patent Primary Examiner
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
094707110
Date of Patent
October 18, 2016
0Patent Application Number
138534370
Date Filed
March 29, 2013
0Official Website
Patent Primary Examiner
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US Patent 09470711 Physical quantity sensor and electronic apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
09470711
Date of patent
October 18, 2016
Patent application number
13853437
Date Filed
March 29, 2013
Patent primary examiner
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