US Patent 9518932 Metrology optimized inspection
Patent 9518932 was granted and assigned to KLA-Tencor on December, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 17, 2014
Date of Patent
December 13, 2016
Patent Applicant
Patent Application Number
14517751
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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