US Patent 9530912 Three-dimensional patterning methods and related devices
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Patent abstract
Three-dimensional patterning methods of a three-dimensional microstructure, such as a semiconductor wire array, are described, in conjunction with etching and/or deposition steps to pattern the three-dimensional microstructure.
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US Patent 09530912 Three-dimensional patterning methods and related devices US Patent 9530912 Three-dimensional patterning methods and related devices
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Patent Number
0953091200
Patent Number
953091200
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Patent Jurisdiction
Patent Number
095309120
Date of Patent
December 27, 2016
0Patent Application Number
129564220
Date Filed
November 30, 2010
0Official Website
Patent Primary Examiner
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Infobox
Is a
Patent Jurisdiction
Patent Number
095309120
Date of Patent
December 27, 2016
0Patent Application Number
129564220
Date Filed
November 30, 2010
0Official Website
Patent Primary Examiner
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Golden AI
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US Patent 09530912 Three-dimensional patterning methods and related devices
Infobox
Is a
Patent jurisdiction
Patent number
09530912
Date of patent
December 27, 2016
Patent application number
12956422
Date Filed
November 30, 2010
Patent primary examiner
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