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US Patent 9536759 Baking apparatus and method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
May 29, 2015
Date of Patent
January 3, 2017
Patent Application Number
14725285
Patent Citations Received
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US Patent 12134690 Photoresist composition and method of manufacturing a semiconductor device
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US Patent 12087580 Method of manufacturing semiconductor devices
0
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US Patent 12085855 Resin, photoresist composition, and method of manufacturing semiconductor device
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US Patent 12135502 Resin, photoresist composition, and method of manufacturing semiconductor device
0
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US Patent 11705332 Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern
0
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US Patent 11703765 Photoresist composition and method of manufacturing a semiconductor device
0
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US Patent 11714355 Photoresist composition and method of forming photoresist pattern
0
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US Patent 11784046 Method of manufacturing a semiconductor device
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US Patent 11791161 Pattern fidelity enhancement
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US Patent 11841618 Photoresist system and method
0
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9536759
Patent Primary Examiner
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Robert Bachner

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