Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ming-Tan Lee0
Chen-Hua Yu0
Hung-Jui Kuo0
De-Yuan Lu0
Date of Patent
December 12, 2023
0Patent Application Number
175675600
Date Filed
January 3, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A photoresist apparatus and a method are provided. The photoresist apparatus includes a pre-baking apparatus. The pre-baking apparatus includes: a hot-plate, a first cover over the hot-plate, a second cover over the first cover, a first heating element extending along a topmost surface of the first cover, and a second heating element extending along a topmost surface of the second cover.
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