Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ching-Yu Chang0
Date of Patent
April 21, 2015
0Patent Application Number
137329440
Date Filed
January 2, 2013
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Provided is a method including providing a substrate and forming a bottom anti-reflective coating (BARC) on the substrate. The BARC includes a first portion overlying a second portion, which has a different composition than the first portion. The different composition may provide a different dissolution property of the BARC in a developer. A photoresist layer is formed on the first portion of the BARC. The photoresist layer is then irradiated and developed. The developing includes using a developer to remove a region of the photoresist layer and a region of the first and second portions of the BARC.
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