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US Patent 9536982 Etch stop for airgap protection

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edited on 24 Oct, 2024
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Patent Citations Received
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US Patent 12125897 Air spacers in transistors and methods forming same
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Edits on 6 Dec, 2023
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edited on 6 Dec, 2023
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Patent abstract

A semiconductor device that includes a gate structure on a channel region of a semiconductor device. Source and drain regions may be present on opposing sides of the channel region. The semiconductor device may further include a composite gate sidewall spacer present on a sidewall of the gate structure. The composite gate sidewall spacer may include a first composition portion having an air gap encapsulated therein, and a second composition portion that is entirely solid and present atop the first composition portion.

Edits on 22 Jul, 2023
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edited on 22 Jul, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0953698200
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US Patent 09536982 Etch stop for airgap protection US Patent 9536982 Etch stop for airgap protection

Infobox
Patent Number
0953698200
Patent Number
953698200
Edits on 4 Apr, 2023
"Entity importer update"
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edited on 4 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
095369820
Date of Patent
January 3, 2017
0
Patent Application Number
149308950
Date Filed
November 3, 2015
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=095369820
Patent Primary Examiner
‌
George Fourson, III
0
Edits on 5 Oct, 2022
"Entity importer update"
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Golden AI
edited on 5 Oct, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
095369820
Date of Patent
January 3, 2017
0
Patent Application Number
149308950
Date Filed
November 3, 2015
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=095369820
Patent Primary Examiner
‌
George Fourson, III
0
Edits on 6 Jun, 2022
"Entity importer update"
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edited on 6 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09536982
Edits on 10 Jan, 2022
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created this topic on 10 Jan, 2022
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 US Patent 09536982 Etch stop for airgap protection

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09536982
Date of patent
January 3, 2017
Patent application number
14930895
Date Filed
November 3, 2015
Patent primary examiner
‌
George Fourson, III

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