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US Patent 9550211 Temperature compensation in a CMUT device

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
April 6, 2012
Date of Patent
January 24, 2017
Patent Application Number
14006972
Patent Citations Received
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US Patent 11772961 MEMS device with perimeter barometric relief pierce
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US Patent 11787688 Methods of forming MEMS diaphragms including corrugations
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US Patent 11780726 Dual-diaphragm assembly having center constraint
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9550211
Patent Primary Examiner
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James Hulka

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