Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard Quintanilha0
Date of Patent
February 7, 2017
0Patent Application Number
149347340
Date Filed
November 6, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method uses a lithographic apparatus to form an inspection target structure upon a substrate. The method comprises forming the periphery of the inspection target structure so as to provide a progressive optical contrast transition between the inspection target structure and its surrounding environment. This may be achieved by providing a progressive change in the optical index at the periphery of the target structure.
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