Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroaki Tanaka0
Yoshiaki Tanaka0
Minako Terao0
Date of Patent
February 28, 2017
Patent Application Number
13906121
Date Filed
May 30, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A micro flow sensor includes: a flow path through which a fluid to be measured flows; a detection unit having a heater configured to heat the fluid to be measured in the flow path and temperature sensors configured to measure temperature of a fluid to be measured in the flow path; an arithmetic unit configured to measure a flow rate of the fluid to be measured flowing through the flow path based on the temperature of the fluid to be measured, measured by the temperature sensors; and a narrowed portion disposed on an upstream side of the detection unit in the flow path for narrowing the flow path.
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