US Patent 9581480 Micro flow sensor

Patent 9581480 was granted and assigned to Yokogawa Electric on February, 2017 by the United States Patent and Trademark Office.

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Patent abstract

A micro flow sensor includes: a flow path through which a fluid to be measured flows; a detection unit having a heater configured to heat the fluid to be measured in the flow path and temperature sensors configured to measure temperature of a fluid to be measured in the flow path; an arithmetic unit configured to measure a flow rate of the fluid to be measured flowing through the flow path based on the temperature of the fluid to be measured, measured by the temperature sensors; and a narrowed portion disposed on an upstream side of the detection unit in the flow path for narrowing the flow path.

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Patent Inventor Names

Hiroaki Tanaka0

Minako Terao0

Yoshiaki Tanaka0

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