Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Terence B. Hook0
Rajan K. Pandey0
Rajesh Sathiyanarayanan0
Takashi Ando0
Mohit Bajaj0
Date of Patent
February 28, 2017
0Patent Application Number
149462450
Date Filed
November 19, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A work function setting metal stack includes a configuration of layers including a high dielectric constant layer and a diffusion prevention layer formed on the high dielectric constant layer. An aluminum doped TiC layer has a thickness greater than 5 nm wherein the configuration of layers is employed between two regions as a diffusion barrier to prevent mass diffusion between the two regions.
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