US Patent 9620337 Determining a malfunctioning device in a plasma system
Patent 9620337 was granted and assigned to Lam Research on April, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 19, 2014
0
Date of Patent
April 11, 2017
0
Patent Applicant
Patent Application Number
14184631
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Patent Citations Received
Patent Inventor Names
Bradford J. Lyndaker
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John C. Valcore, Jr.
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Arthur Sato
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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