Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 9, 2017
Patent Application Number
15163553
Date Filed
May 24, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A sulfonium salt having both anion and cation moieties in the molecule functions as a photoacid generator and is compatible with other components. A resist composition comprising the sulfonium salt has the advantages of reduced acid diffusion and forms a pattern with a good balance of sensitivity, MEF and DOF, less outgassing, and minimal defects.
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