Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 18, 2017
Patent Application Number
15150968
Date Filed
May 10, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A plasma source assembly for use with a processing chamber is described. The assembly includes a multi-feed RF power connection to a single or multiple RF hot electrodes.
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