Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles I. Grosjean0
Ginel C. Hill0
Joseph C. Doll0
Nicholas Miller0
Paul M. Hagelin0
Date of Patent
July 18, 2017
Patent Application Number
15186510
Date Filed
June 19, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
In a MEMS device having a substrate and a moveable micromachined member, a mechanical structure secures the moveable micromachined member to the substrate, thermally isolates the moveable micromachined member from the substrate and provides a conduction path to enable heating of the moveable micromachined member to a temperature of at least 300 degrees Celsius.
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