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US Patent 9712128 Microelectromechanical resonator

Patent 9712128 was granted and assigned to SiTime on July, 2017 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 11975965 MEMS resonator
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US Patent 11916534 Microelectromechanical resonator
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US Patent 11909354 Ovenized MEMS
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Patent abstract

In a MEMS device having a substrate and a moveable micromachined member, a mechanical structure secures the moveable micromachined member to the substrate, thermally isolates the moveable micromachined member from the substrate and provides a conduction path to enable heating of the moveable micromachined member to a temperature of at least 300 degrees Celsius.

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Patent Inventor Names
Charles I. Grosjean0
Ginel C. Hill0
Joseph C. Doll0
Nicholas Miller0
Paul M. Hagelin0
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Patent Citations Received
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US Patent 11677379 Microelectromechanical resonator
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US Patent 09712128 Microelectromechanical resonator US Patent 9712128 Microelectromechanical resonator

Infobox
Patent Number
09712128
Patent Number
9712128
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=09712128
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09712128
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 US Patent 09712128 Microelectromechanical resonator

Infobox
Is a
Patent
Patent
Patent applicant
SiTime
SiTime
Current assignee
SiTime
SiTime
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09712128
Date of patent
July 18, 2017
Patent application number
15186510
Date Filed
June 19, 2016
Patent primary examiner
‌
Thomas Dougherty

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