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US Patent 9728378 Method for controlling an RF generator

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
July 29, 2016
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Date of Patent
August 8, 2017
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Patent Application Number
15223984
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Patent Citations Received
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 11972928 Method and system for plasma processing arc suppression
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US Patent 12002611 High power low frequency coils
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US Patent 12027351 Plasma non-uniformity detection
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US Patent 11769651 High-frequency power supply device and output method of high-frequency power
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US Patent 11791134 Impedance adjustment device
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US Patent 11887820 Sector shunts for plasma-based wafer processing systems
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US Patent 11923175 Systems and methods for variable gain tuning of matching networks
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US Patent 11961711 Radio frequency match network and generator
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Patent Inventor Names
Imran Ahmed Bhutta
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Tomislav Lozic
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9728378
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Patent Primary Examiner
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Dinh T Le
0

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