US Patent 9728429 Parasitic plasma prevention in plasma processing chambers
Patent 9728429 was granted and assigned to Lam Research on August, 2017 by the United States Patent and Trademark Office.
All edits
Edits on 23 Oct, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 9 Oct, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 3 Oct, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 7 Aug, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
0
Edits on 15 May, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 1 May, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 24 Apr, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 1 Feb, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 6 Dec, 2023
Golden AI
Edits made to:
Article (+351 characters)
Article
Patent abstract
Parasitic plasma in voids in a component of a plasma processing chamber can be eliminated by covering electrically conductive surfaces in an interior of the voids with a sleeve. The voids can be gas holes, lift pin holes, helium passages, conduits and/or plenums in chamber components such as an upper electrode and a substrate support.
Edits on 30 Sep, 2023
Golden AI
Edits made to:
Infobox (+3 properties)
Infobox
Patent Inventor Names
Anthony Ricci0
Larry Martinez0
Saurabh Ullal0
Edits on 15 Jul, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 09728429 Parasitic plasma prevention in plasma processing chambers US Patent 9728429 Parasitic plasma prevention in plasma processing chambers
Infobox
Patent Number
09728429
Patent Number
9728429
Edits on 14 Jan, 2022
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 09728429 Parasitic plasma prevention in plasma processing chambers
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
09728429
Date of patent
August 8, 2017
Patent application number
12844527
Date Filed
July 27, 2010
Patent primary examiner
Find more entities like US Patent 9728429 Parasitic plasma prevention in plasma processing chambers
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
