Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masanobu Ezaki0
Tetsuji Ueda0
Hisatoshi Otsuka0
Shigeru Maida0
Date of Patent
August 29, 2017
0Patent Application Number
139206280
Date Filed
June 18, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.
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