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US Patent 11987521 Substrate for a reflective optical element

Patent 11987521 was granted and assigned to Carl Zeiss SMT on May, 2024 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Carl Zeiss SMT

Current Assignee

Carl Zeiss SMT

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

119875210

Patent Inventor Names

Eric Eva0

Date of Patent

May 21, 2024

Patent Application Number

171366420

Date Filed

December 29, 2020

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CPC Code

Patent abstract

In order to reduce the degree of relaxation after an optical substrate has been compacted, in particular after a longer period, substrates (

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